My Research

• MEMS industry is projected to become a $11.5B industry by 2011.
• Number of MEMS devices available are increasing and fabrication techniques/materials used are growing rapidly.
• Conventional integration strategies are becoming obsolete and are unable to keep up with demand for:
  • increased compatibility with new materials /processes
  • higher performance (electrical and mechanical)
  • higher I/O density
  • shorter time-to-market
  • lower cost solutions

My research aims to address above demands through the use of novel compliant interconnects and through-silicon-vias, thereby enabling the integration of a state-of-the-art CMOS process with an arbitrary MEMS process.